Search results for "Microlithography 3-D Litography Microfabrication"

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Technologies for the fabrication of cylindrical fine line devices

1997

Abstract A microlithographic process suited for metal patterning on cylindrical substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.

Materials scienceFabricationbusiness.industryMetal coatingFine lineCondensed Matter PhysicsSettore ING-INF/01 - ElettronicaAtomic and Molecular Physics and OpticsSurfaces Coatings and FilmsElectronic Optical and Magnetic MaterialsMicrolithography 3-D Litography MicrofabricationEtching (microfabrication)OptoelectronicsElectrical and Electronic Engineeringbusiness

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